DocumentCode
289700
Title
Rapid thermal processing systems: overview of capabilities and limitations
Author
Roozeboom, Fred
Author_Institution
Philips Res. Lab., Eindhoven, Netherlands
fYear
1993
fDate
17-20 Oct 1993
Firstpage
1
Abstract
This paper reviews the current status, problems and options in RTP system and process design. Some commercial systems are discussed along with some improvements that can still be made in temperature reproducibility, process control and yield. This includes developments in temperature reproducibility by compensated emissivity control
Keywords
integrated circuit manufacture; process control; rapid thermal processing; temperature control; capabilities; commercial systems; compensated emissivity control; limitations; process control; rapid thermal processing systems; temperature reproducibility; yield; Absorption; Lamps; Optical filters; Optical noise; Optical sensors; Rapid thermal processing; Reproducibility of results; Shape control; Silicon; Temperature sensors;
fLanguage
English
Publisher
ieee
Conference_Titel
Systems, Man and Cybernetics, 1993. 'Systems Engineering in the Service of Humans', Conference Proceedings., International Conference on
Conference_Location
Le Touquet
Print_ISBN
0-7803-0911-1
Type
conf
DOI
10.1109/ICSMC.1993.384841
Filename
384841
Link To Document