Title :
Rapid thermal processing systems: overview of capabilities and limitations
Author_Institution :
Philips Res. Lab., Eindhoven, Netherlands
Abstract :
This paper reviews the current status, problems and options in RTP system and process design. Some commercial systems are discussed along with some improvements that can still be made in temperature reproducibility, process control and yield. This includes developments in temperature reproducibility by compensated emissivity control
Keywords :
integrated circuit manufacture; process control; rapid thermal processing; temperature control; capabilities; commercial systems; compensated emissivity control; limitations; process control; rapid thermal processing systems; temperature reproducibility; yield; Absorption; Lamps; Optical filters; Optical noise; Optical sensors; Rapid thermal processing; Reproducibility of results; Shape control; Silicon; Temperature sensors;
Conference_Titel :
Systems, Man and Cybernetics, 1993. 'Systems Engineering in the Service of Humans', Conference Proceedings., International Conference on
Conference_Location :
Le Touquet
Print_ISBN :
0-7803-0911-1
DOI :
10.1109/ICSMC.1993.384841
