Title :
Real analysis of residual gas in electrical tube
Author :
Mei Xiao ; Xiaobing Zhang
Author_Institution :
Sch. of Electron. Sci. & Eng., Southeast Univ., Nanjing, China
Abstract :
With the feature of small vacuum chamber and resistant over 450°C baking in vacuum, micro-chamber quadruple mass spectrometer (MCQMS) can seal together with the tube and seal off after the same exhaust process. Thus the residual gas composition within the tube can be monitored truly in the process of entire life of tube. In this paper, the results of analyzing the residual gas by using of MCQMS instead of conventional quadruple mass spectrometry were given.
Keywords :
chemical analysis; mass spectrometers; vacuum tubes; MCQMS; electrical tube; microchamber quadruple mass spectrometer; residual gas; small vacuum chamber; Anodes; Cathodes; Electron tubes; Gases; Gettering; Heating; Ionization; quadruple mass spectrometer; residual gas; tube;
Conference_Titel :
Vacuum Electronics Conference (IVEC), 2012 IEEE Thirteenth International
Conference_Location :
Monterey, CA
Print_ISBN :
978-1-4673-0188-6
Electronic_ISBN :
978-1-4673-0187-9
DOI :
10.1109/IVEC.2012.6262084
