Title :
Optimal design of sensor micro-structures
Author :
Murthi, A. ; Rocaries, F.
Author_Institution :
ESIEE, Noisy-Le-Grand, France
Abstract :
In this paper, the problem of designing the shape of a resonant device for minimum mass under multiple frequency and manufacturing constraints, is considered. An optimality criterion method has been used in optimization. The developed program is designed to interface and exploit the results of a commercial finite element code, ANSYS
Keywords :
finite element analysis; mechanical engineering; microsensors; optimisation; ANSYS; finite element code; frequency constraints; manufacturing constraints; optimization; resonant device; sensor micro-structures; Constraint optimization; Design optimization; Finite element methods; Frequency estimation; Lagrangian functions; Multi-stage noise shaping; Optimization methods; Resonance; Sensor phenomena and characterization; Shape;
Conference_Titel :
Systems, Man and Cybernetics, 1993. 'Systems Engineering in the Service of Humans', Conference Proceedings., International Conference on
Conference_Location :
Le Touquet
Print_ISBN :
0-7803-0911-1
DOI :
10.1109/ICSMC.1993.384918
