• DocumentCode
    289759
  • Title

    Optimal design of sensor micro-structures

  • Author

    Murthi, A. ; Rocaries, F.

  • Author_Institution
    ESIEE, Noisy-Le-Grand, France
  • fYear
    1993
  • fDate
    17-20 Oct 1993
  • Firstpage
    478
  • Abstract
    In this paper, the problem of designing the shape of a resonant device for minimum mass under multiple frequency and manufacturing constraints, is considered. An optimality criterion method has been used in optimization. The developed program is designed to interface and exploit the results of a commercial finite element code, ANSYS
  • Keywords
    finite element analysis; mechanical engineering; microsensors; optimisation; ANSYS; finite element code; frequency constraints; manufacturing constraints; optimization; resonant device; sensor micro-structures; Constraint optimization; Design optimization; Finite element methods; Frequency estimation; Lagrangian functions; Multi-stage noise shaping; Optimization methods; Resonance; Sensor phenomena and characterization; Shape;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Systems, Man and Cybernetics, 1993. 'Systems Engineering in the Service of Humans', Conference Proceedings., International Conference on
  • Conference_Location
    Le Touquet
  • Print_ISBN
    0-7803-0911-1
  • Type

    conf

  • DOI
    10.1109/ICSMC.1993.384918
  • Filename
    384918