Title :
Optical fiber for delivering deep-UV laser light
Author :
Oto, Masanori ; Hirano, Masahiro ; Hosono, Hideo
Author_Institution :
Showa Electr. Wire & Cable Co. Ltd., Kanagawa, Japan
Abstract :
In the present work, we fabricated optical fibers using fluorine doped silica glass called "modified fused silica", which was developed for optical materials of vacuum-UV lithography. The fiber with hydrogen impregnation exhibits high transmission and high deep-UV resistivity in comparison with the conventional UV fibers.
Keywords :
laser beam effects; optical fibre fabrication; optical fibre losses; optical glass; ultraviolet lithography; conventional UV fibers; deep-UV laser light deliver; deep-UV resistivity; fiber transmission; fluorine doped silica glass; hydrogen impregnated fiber; modified fused silica; optical fiber fabrication; optical materials; vacuum-UV lithography; Conductivity; Fiber lasers; Glass; Laser ablation; Laser applications; Lithography; Optical fibers; Power lasers; Semiconductor lasers; Silicon compounds;
Conference_Titel :
Lasers and Electro-Optics Europe, 2005. CLEO/Europe. 2005 Conference on
Print_ISBN :
0-7803-8974-3
DOI :
10.1109/CLEOE.2005.1568068
