Influence of the kind of absorbing liquid on fundamentals and application at laser-induced backside wet etching

Wang et al. [1999] has introduced a method for laser etching of transparent materials using absorbing liquids called laser-induced backside wet etching (LIBWE). In this approach the etching process of the material is caused by the intense energy deposition near the interface to the solid due to the strong absorption of the high-energy laser light beam by the liquid. The kind and the properties of absorbing liquid are one of the important parameters of the etching process. The used liquid components influence the laser-induced decomposition chemistry directly and cause the formation of a surface layer containing the specific decomposition products. This laser-induced surface modification affects physical processes involved in laser etching and in consequence the etch ratesing and the applications of the etch process essentially basically.