DocumentCode :
2898046
Title :
Blue-light emission from sputtered Ti:SiO2 films without annealing
Author :
Hanaizumi, Osamu ; Ono, Kazutaka ; Ogawa, Yuichi ; Matsumoto, Toshiaki
Author_Institution :
Dept. of Electron. Eng., Gunma Univ., Japan
fYear :
2005
fDate :
12-17 June 2005
Firstpage :
299
Abstract :
In this report, we found that Ti:SiO2 co-sputtered films could emit blue light at room temperature without annealing. Ti:SiO2 films were deposited on fused SiO2 substrates by using an rf-sputtering apparatus and we used one to two Ti tablets placed on SiO2 plate as a target.
Keywords :
optical fabrication; optical films; photoluminescence; silicon compounds; sputtering; titanium; 293 to 298 K; SiO2; SiO2:Ti; Ti:SiO2 co-sputtered film deposition; blue-light emission; rf-sputtering; Annealing; Energy measurement; Temperature measurement; Wavelength measurement;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Lasers and Electro-Optics Europe, 2005. CLEO/Europe. 2005 Conference on
Print_ISBN :
0-7803-8974-3
Type :
conf
DOI :
10.1109/CLEOE.2005.1568083
Filename :
1568083
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2898046
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