Title :
Introductory paper: Device fabrication
Author_Institution :
Texas Instruments, Inc., Dallas, TX, USA
Keywords :
Costs; Fabrication; Feedback; Integrated circuit interconnections; Solid state circuits;
Conference_Titel :
Solid-State Circuits Conference. Digest of Technical Papers. 1966 IEEE International
Conference_Location :
Philadelphia, PA, USA
DOI :
10.1109/ISSCC.1966.1157697