Silicone polymer based optical modulator - design and fabrication process

Author

Cristea, D. ; Obreja, P. ; Kusko, M. ; Moagar-Poladian, V.

Author_Institution

Nat. Inst. for Res. & Dev. in Microtechnol., Bucharest, Romania

fYear

2005

fDate

12-17 June 2005

Firstpage

339

Abstract

This paper presents the design and the fabrication process for a spatial optical modulator based on curvature modulation using a continuous reflective surface with the voltage induced deformation. The device consists of an interdigitated bottom electrode, a compliant silicone layer (PDMS), and a top electrode. A coupled opto-electro-mechanical simulation was carried out to determine the optimum geometry. As PDMS is not a photo-definable polymer, we used a photoresist mold to obtain the device.

Keywords

deformation; optical design techniques; optical fabrication; optical modulation; optical polymers; photoresists; silicones; continuous reflective surface; curvature modulation; fabrication process; interdigitated bottom electrode; optical modulator design; opto-electro-mechanical simulation; photo-definable polymer; photoresist mold; silicone polymer; spatial optical modulator; voltage induced deformation; Electrodes; Geometrical optics; Optical design; Optical device fabrication; Optical modulation; Optical polymers; Process design; Resists; Solid modeling; Voltage;

fLanguage

English

Publisher

ieee

Conference_Titel

Lasers and Electro-Optics Europe, 2005. CLEO/Europe. 2005 Conference on

Print_ISBN

0-7803-8974-3

Type

conf

DOI

10.1109/CLEOE.2005.1568120

Filename

1568120