DocumentCode
2898926
Title
A Generic Test Structure Heater Design And Characterization
Author
Messick, Cleston Ray ; Turner, Timothy E.
Author_Institution
National Semiconductor
fYear
1992
fDate
25-28 Oct. 1992
Firstpage
83
Lastpage
87
Keywords
Automatic testing; Current measurement; Electrical resistance measurement; Pollution measurement; Probes; Semiconductor device testing; Stress measurement; Temperature measurement; Threshold voltage; Voltage measurement;
fLanguage
English
Publisher
ieee
Conference_Titel
Wafer Level Reliability Workshop, 1992. Final Report., 1992 International
Conference_Location
Lake Tahoe, CA, USA
Type
conf
DOI
10.1109/IWLR.1992.657988
Filename
657988
Link To Document