• DocumentCode
    2898926
  • Title

    A Generic Test Structure Heater Design And Characterization

  • Author

    Messick, Cleston Ray ; Turner, Timothy E.

  • Author_Institution
    National Semiconductor
  • fYear
    1992
  • fDate
    25-28 Oct. 1992
  • Firstpage
    83
  • Lastpage
    87
  • Keywords
    Automatic testing; Current measurement; Electrical resistance measurement; Pollution measurement; Probes; Semiconductor device testing; Stress measurement; Temperature measurement; Threshold voltage; Voltage measurement;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Wafer Level Reliability Workshop, 1992. Final Report., 1992 International
  • Conference_Location
    Lake Tahoe, CA, USA
  • Type

    conf

  • DOI
    10.1109/IWLR.1992.657988
  • Filename
    657988