Title :
ICMTS 92. Proceedings of the 1992 International Conference on Microelectronic Test Structures (Cat. No.92CH3102-1)
Abstract :
Presents the cover from the proceedings of this conference.
Keywords :
circuit reliability; integrated circuit technology; integrated circuit testing; monolithic integrated circuits; semiconductor device models; semiconductor process modelling; capacitance measurement extraction; defect analysis; device measurements; dimensional measurements; hot carrier reliability issues; modeling; parameter extraction; process characterization; reliability prediction; test structures; yield management;
Conference_Titel :
Microelectronic Test Structures, 1992. ICMTS 1992. Proceedings of the 1992 International Conference on
Conference_Location :
San Diego, CA, USA
Print_ISBN :
0-7803-0535-3
DOI :
10.1109/ICMTS.1992.185919
