Title :
A high-speed TEG evaluation system integrating parallel/continuous processing software and high-speed hardware
Author :
Kubota, Katsutoshi ; Takeda, Tadao ; Sakurai, Tetsuma
Author_Institution :
NTT LSI Lab., Kanagawa, Japan
Abstract :
At the LSI process development stage, fabrication, and evaluation of a test element group (TEG) are repeatedly carried out to obtain optimum fabrication conditions. A high-speed TEG evaluation system was developed. By combining (1) a high-speed database with suitable indexes formed on a database machine, (2) a means of inputting data in parallel with measurements, and (3) a specialized measurement instrument equipped with an analog feedback unit for high-speed measurement, a fivefold increase in TEG evaluation speed was obtained
Keywords :
automatic testing; integrated circuit testing; large scale integration; production testing; LSI process development; TEG evaluation system; analog feedback unit; database machine; measurement instrument; optimum fabrication conditions; parallel/continuous processing software; test element group; Data processing; Database machines; Fabrication; Fluid flow measurement; Hardware; Indexes; Instruments; Software measurement; Velocity measurement; Workstations;
Conference_Titel :
Microelectronic Test Structures, 1992. ICMTS 1992. Proceedings of the 1992 International Conference on
Conference_Location :
San Diego, CA
Print_ISBN :
0-7803-0535-3
DOI :
10.1109/ICMTS.1992.185958
