Title :
Computing the effects of discrete Coulomb interaction in triode gun with magnetic lens
Author :
Munro, Eric ; Rouse, John ; Liu, Haoning ; Katsap, Victor
Author_Institution :
Munro´´s Electron Beam Software Ltd., London, UK
Abstract :
Boersch, or stochastic space charge effect, is the effect of broadening of the e-beam axial energy spectrum. It limits resolution of fine electron optics by means of change in axial velocity of electrons. This is caused by a stochastic, discrete el ectron-electron interactions in an electron beam. We have computed beam energy spectrum widening in triode gun with magnetic lens.
Keywords :
electron beam effects; electron optics; magnetic lenses; triodes; discrete Coulomb interaction; discrete el ectron-electron interactions; e-beam axial energy spectrum; electron axial velocity; fine electron optics; magnetic lens; stochastic space charge effect; triode gun; Computational modeling; Electron beams; Electron optics; Lenses; Magnetic resonance imaging; Space exploration; Stochastic processes; Boersch; e-beam lithography; electrons energy spread; stochastic Coulomb interaction;
Conference_Titel :
Vacuum Electronics Conference (IVEC), 2012 IEEE Thirteenth International
Conference_Location :
Monterey, CA
Print_ISBN :
978-1-4673-0188-6
Electronic_ISBN :
978-1-4673-0187-9
DOI :
10.1109/IVEC.2012.6262203
