DocumentCode
2900669
Title
Effect of linewidth fluctuations and sidewall roughness in scatterometry
Author
Schuster, Thomas ; Kenvien, Norbert ; Osten, Wolfgang ; Reinig, Peter ; Moert, Manfred ; Hingst, Thomas ; Mantz, Ulrich
Author_Institution
Inst. fur Technische Opt., Stuttgart Univ., Germany
fYear
2005
fDate
12-17 June 2005
Firstpage
451
Abstract
We investigated the effect of linewidth fluctuations and sidewall roughness on wavelength spectra in scatterometry using rigorous coupled wave analysis. For both cases the influence of mean values and fluctuations can be separated.
Keywords
light scattering; optical variables measurement; surface roughness; linewidth fluctuation effect; rigorous coupled wave analysis; scatterometry; sidewall roughness; wavelength spectra; Diffraction gratings; Fluctuations; Libraries; Periodic structures; Radar measurements; Resists; Scanning electron microscopy; Scattering; Silicon; Wavelength measurement;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics Europe, 2005. CLEO/Europe. 2005 Conference on
Print_ISBN
0-7803-8974-3
Type
conf
DOI
10.1109/CLEOE.2005.1568229
Filename
1568229
Link To Document