DocumentCode
2900832
Title
Laser radiometry for the vacuum-ultraviolet spectral range
Author
Kück, Stefan ; Brandt, Friedheim ; Taddeo, Mario ; Kremling, Hans-Albert
Author_Institution
Opt. Div., Phys. Tech. Bundesanstalt, Braunschweig, Germany
fYear
2005
fDate
12-17 June 2005
Firstpage
464
Abstract
In this presentation, we report on the characterization of a new standard detector for the F2 laser radiation at 157 nm and on the results of the first calibrations at 157 nm in nitrogen atmosphere at average power levels close to 1 W. For production control, standardization and safety regulations during testing and production, calibrated radiometers with uncertainties <2% are necessary. Therefore, a vacuum-compatible setup has been established, which also allows measurements in specific atmospheres, under steady pressure or at a specific flow rate.
Keywords
calibration; chemical lasers; fluorine; measurement by laser beam; production control; radiometry; regulation; standardisation; ultraviolet spectra; 157 nm; F2; F2 laser radiation; flow rate; laser radiometry; nitrogen atmosphere; power level; production control; radiometer calibration; safety regulation; standardization; steady pressure; testing; vacuum-compatible setup; vacuum-ultraviolet spectral range; Atmosphere; Calibration; Nitrogen; Power lasers; Product safety; Production control; Radiation detectors; Radiation safety; Radiometry; Standardization;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics Europe, 2005. CLEO/Europe. 2005 Conference on
Print_ISBN
0-7803-8974-3
Type
conf
DOI
10.1109/CLEOE.2005.1568242
Filename
1568242
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