• DocumentCode
    2900920
  • Title

    Thin Oxide Development And Monitoring vehicle

  • Author

    Messick, Cleston Ray

  • Author_Institution
    National Semiconductor
  • fYear
    1992
  • fDate
    25-28 Oct. 1992
  • Firstpage
    146
  • Lastpage
    150
  • Keywords
    Acceleration; Capacitors; Conductors; Density measurement; Geometry; Monitoring; Semiconductor device manufacture; Testing; Vehicles; Very large scale integration;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Wafer Level Reliability Workshop, 1992. Final Report., 1992 International
  • Conference_Location
    Lake Tahoe, CA, USA
  • Type

    conf

  • DOI
    10.1109/IWLR.1992.657998
  • Filename
    657998
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2900920