• DocumentCode
    2901161
  • Title

    Plasma polymers prepared by rf sputtering

  • Author

    Biederman, H.

  • Author_Institution
    Fac. of Math. & Phys., Charles Univ., Prague, Czech Republic
  • fYear
    1999
  • fDate
    1999
  • Firstpage
    42552
  • Lastpage
    42555
  • Abstract
    The deposition of plasma polymers using radiofrequency sputtering of polymer targets is promising especially in case of fluorocarbon films for various applications. Gaseous organic fragments as precursors for the plasma polymerization process are emitted and fragmented from the conventional polymer target. No gaseous or liquid precursors are needed
  • Keywords
    polymer films; deposition; fluorocarbon films; gaseous organic fragments; plasma polymerization process; plasma polymers; polymer targets; precursors; radiofrequency sputtering;
  • fLanguage
    English
  • Publisher
    iet
  • Conference_Titel
    Plasma Polymerisation - Processing for the Future (Ref. No. 1999/026), IEE Seminar on
  • Conference_Location
    London
  • Type

    conf

  • DOI
    10.1049/ic:19990163
  • Filename
    773156
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2901161