Design, modelling and evaluation of micromirrors

The use of a range of modelling techniques in the design of electrostatically actuated micromirrors has been demonstrated. Both simple 1D modelling and full 3D finite element techniques have their own merits and neither can be neglected at the cost of the other. However, as in the case of any modelling exercise, the data produced is only as good as the input information. Consequently, if the concept of the virtual fabrication laboratory is to be applied to the design of micromachined structures for MEOMS, accurate knowledge of both material properties and process tolerances remain key issues