• DocumentCode
    2901260
  • Title

    Spurious mode suppression in electrostatic comb-drive X-Y microactuators

  • Author

    Harness, T. ; Syms, Richard R. A.

  • Author_Institution
    Dept. of Electr. & Electron. Eng., Imperial Coll. of Sci., Technol. & Med., London, UK
  • fYear
    1999
  • fDate
    1999
  • Firstpage
    42491
  • Lastpage
    42494
  • Abstract
    In this work, electrostatic comb-drive X-Y microactuators with a twin flexure structure are fabricated by bulk micromachining of boron-doped Si. The experimental results on spurious mode suppression are explained using a coupled-mode model
  • Keywords
    electrostatic actuators; Si:B; boron doped silicon; bulk micromachining; coupled-mode model; electrostatic comb-drive X-Y microactuator; spurious mode suppression; twin flexure structure;
  • fLanguage
    English
  • Publisher
    iet
  • Conference_Titel
    Microengineering, Modelling and Design (Ref. No. 1999/052), IEE Seminar on
  • Conference_Location
    London
  • Type

    conf

  • DOI
    10.1049/ic:19990276
  • Filename
    773162
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2901260