Optical distributions using low-loss submicron rib SOI structures

Author

Vivien, Laurent ; Marris, Delphine ; Rouvière, Mathieu ; Lardenois, Sébastien ; Laval, Suzanne ; Pascal, Daniel ; Cassan, Eric ; Fédéli, J.M. ; El Melhaoui, L.

Author_Institution

Inst. d´´Electron. Fondamentale, Univ. de Paris-Sud, Orsay, France

fYear

2005

fDate

12-17 June 2005

Firstpage

507

Abstract

Silicon-on-insulator (SOI) substrates have generated an increasing interest in the recent years, for both microelectronic and microphotonic applications. SOI substrates allow a strong integration density of optical devices. In this paper, experimental results concerning the passive optical SOI devices (grating couplers, rib waveguides, compact T-splitter, corner mirrors) and 16 optical distributions suitable for intrachip optical interconnects will be presented.

Keywords

diffraction gratings; integrated optics; micro-optics; optical beam splitters; optical couplers; optical interconnections; optical waveguides; rib waveguides; silicon-on-insulator; Si-SiO₂; compact T-splitter; corner mirrors; grating couplers; intrachip optical interconnects; low-loss submicron rib SOI waveguides; microelectronic applications; microphotonic applications; optical distributions; passive optical silicon-on-insulator devices; Electromagnetic waveguides; Microelectronics; Mirrors; Optical devices; Optical films; Optical interconnections; Optical microscopy; Optical recording; Optical sensors; Optical waveguides;

fLanguage

English

Publisher

ieee

Conference_Titel

Lasers and Electro-Optics Europe, 2005. CLEO/Europe. 2005 Conference on

Print_ISBN

0-7803-8974-3

Type

conf

DOI

10.1109/CLEOE.2005.1568285

Filename

1568285