Title :
Experimental characterization of LIGA fabricated 0.22 THz TWT circuits
Author :
Baig, Anisullah ; Gamzina, Diana ; Johnson, Micheal ; Domier, Calvin W. ; Spear, Alexander ; Barnett, Larry R. ; Luhmann, Neville C. ; Shin, Young-Min
Author_Institution :
Dept. of Eng. & Appl. Sci., Univ. of California, Davis, CA, USA
Abstract :
In this paper we report precision MEMS Fabrication using novel LIGA technique for 0.22 THz micro-metallic staggered double-vane TWT circuits. For this high aspect ratio structure negative tone photo-resist KMPR was used. The entire fabrication process starting from spin coating, UV-lithography, electroforming and mold removal processing was fully characterized. Finally, the high tolerance TWT structure with smoothness (50-80 nm) was aligned in a specially engineered fixture for RF measurements in the BWO range 165-270GHz. The experiment showed excellent transmission 5-8 dB in frequency range 210-265 GHz. This result showed a distinct potential of applying this precision fabrication technique for the mass production of THz sources.
Keywords :
LIGA; backward wave oscillators; micromechanical devices; moulding; photoresists; spin coating; travelling wave tubes; BWO; LIGA fabricated TWT circuits; RF measurements; UV lithography; electroforming; frequency 165 THz to 270 THz; high tolerance TWT structure; micrometallic staggered double vane TWT circuits; mold removal processing; negative tone photoresist KMPR; precision MEMS fabrication; spin coating; terahertz source; Cavity resonators; Fabrication; Fixtures; Micromechanical devices; Radio frequency; Resists; Security; Cold Test; LIGA; MEMS; THZ sources; TWT;
Conference_Titel :
Vacuum Electronics Conference (IVEC), 2011 IEEE International
Conference_Location :
Bangalore
Print_ISBN :
978-1-4244-8662-5
DOI :
10.1109/IVEC.2011.5746982
