DocumentCode
2902529
Title
Consistency Of Similarly Designed Wafer Level Reliability test Structures Produced In Multiple Fabrication Areas
Author
Turner, Timothy E.
Author_Institution
Turner Engineering Technology
fYear
1992
fDate
25-28 Oct. 1992
Firstpage
215
Lastpage
219
Keywords
Automatic testing; BiCMOS integrated circuits; Foundries; Pollution measurement; Semiconductor device modeling; Semiconductor device reliability; Semiconductor process modeling; Silicon; Temperature; Threshold voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Wafer Level Reliability Workshop, 1992. Final Report., 1992 International
Conference_Location
Lake Tahoe, CA, USA
Type
conf
DOI
10.1109/IWLR.1992.658006
Filename
658006
Link To Document