DocumentCode :
2902669
Title :
Graphene field-effect transistors using large-area monolayer graphene grown by chemical vapor deposition on Co thin films
Author :
Ramón, M.E. ; Gupta, A. ; Corbet, C. ; Ferrer, D.A. ; Movva, H.C.P. ; Carpenter, G. ; Colombo, L. ; Bourianoff, G. ; Doczy, M. ; Akinwande, D. ; Tutuc, E. ; Banerjee, S.K.
Author_Institution :
Microelectron. Res. Center, Univ. of Texas at Austin, Austin, TX, USA
fYear :
2011
fDate :
20-22 June 2011
Firstpage :
123
Lastpage :
124
Abstract :
There has been great interest in methods for the synthesis of high-quality, large-area graphene films, as required for practical applications in the electronics industry. In particular, recent developments in chemical vapor deposition (CVD) methods have shown a promising approach to grow large-area graphene on metal substrates by catalyzed CVD growth. Reports of CVD growth on Cu and Ni are common; however, there have been few efforts to grow graphene on Co, and attempts to grow graphene on Co/SiO2/Si resulted in very small domains of predominantly multilayer graphene that were not suitable for transistor fabrication. Unlike Ni, Co is attractive due to the low lattice mismatch (<; 2%) between graphene and the Co (0001) surface, and Co exhibits greater compatibility with Si than Cu, which is a deep trap in Si and a fast diffuser. Here we have demonstrated graphene field-effect transistors (GFETs) fabricated using large-area monolayer graphene grown by catalyzed CVD on Co films.
Keywords :
chemical vapour deposition; cobalt; field effect transistors; graphene; metallic thin films; monolayers; C; Co; catalyzed CVD growth; chemical vapor deposition; electronics industry; graphene field-effect transistors; large-area graphene films; large-area monolayer graphene; metal substrates; thin films; Furnaces; Optical films; Optical imaging; Silicon;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Device Research Conference (DRC), 2011 69th Annual
Conference_Location :
Santa Barbara, CA
ISSN :
1548-3770
Print_ISBN :
978-1-61284-243-1
Electronic_ISBN :
1548-3770
Type :
conf
DOI :
10.1109/DRC.2011.5994446
Filename :
5994446
Link To Document :
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