• DocumentCode
    2902669
  • Title

    Graphene field-effect transistors using large-area monolayer graphene grown by chemical vapor deposition on Co thin films

  • Author

    Ramón, M.E. ; Gupta, A. ; Corbet, C. ; Ferrer, D.A. ; Movva, H.C.P. ; Carpenter, G. ; Colombo, L. ; Bourianoff, G. ; Doczy, M. ; Akinwande, D. ; Tutuc, E. ; Banerjee, S.K.

  • Author_Institution
    Microelectron. Res. Center, Univ. of Texas at Austin, Austin, TX, USA
  • fYear
    2011
  • fDate
    20-22 June 2011
  • Firstpage
    123
  • Lastpage
    124
  • Abstract
    There has been great interest in methods for the synthesis of high-quality, large-area graphene films, as required for practical applications in the electronics industry. In particular, recent developments in chemical vapor deposition (CVD) methods have shown a promising approach to grow large-area graphene on metal substrates by catalyzed CVD growth. Reports of CVD growth on Cu and Ni are common; however, there have been few efforts to grow graphene on Co, and attempts to grow graphene on Co/SiO2/Si resulted in very small domains of predominantly multilayer graphene that were not suitable for transistor fabrication. Unlike Ni, Co is attractive due to the low lattice mismatch (<; 2%) between graphene and the Co (0001) surface, and Co exhibits greater compatibility with Si than Cu, which is a deep trap in Si and a fast diffuser. Here we have demonstrated graphene field-effect transistors (GFETs) fabricated using large-area monolayer graphene grown by catalyzed CVD on Co films.
  • Keywords
    chemical vapour deposition; cobalt; field effect transistors; graphene; metallic thin films; monolayers; C; Co; catalyzed CVD growth; chemical vapor deposition; electronics industry; graphene field-effect transistors; large-area graphene films; large-area monolayer graphene; metal substrates; thin films; Furnaces; Optical films; Optical imaging; Silicon;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Device Research Conference (DRC), 2011 69th Annual
  • Conference_Location
    Santa Barbara, CA
  • ISSN
    1548-3770
  • Print_ISBN
    978-1-61284-243-1
  • Electronic_ISBN
    1548-3770
  • Type

    conf

  • DOI
    10.1109/DRC.2011.5994446
  • Filename
    5994446