DocumentCode
2903427
Title
Thermal management: Use of aluminum-nitride multilayer heaters in dispenser cathodes
Author
Busbaher, Daniel ; Smith, Peter C. ; LeClair, Robert W.
Author_Institution
Semicon Assoc., Lexington, KY, USA
fYear
2011
fDate
21-24 Feb. 2011
Firstpage
373
Lastpage
374
Abstract
Dispenser cathodes must operate at specific temperature while applying specific heater power. To achieve the required temperature a wire coil heater is commonly used. During the heater and cathode design process several aspects (structure rigidness, heat transfer path, uniformity of surface temperature distribution, heater and cathode life) have to be taken under consideration which makes the design difficult and costly. This paper offers an insight into study of aluminum-nitride drop-in heater package as a heating element for dispenser cathodes.
Keywords
III-V semiconductors; cathodes; coils; multilayers; temperature distribution; thermal management (packaging); wires; aluminum-nitride drop-in heater package; dispenser cathodes; heating element; multilayer heaters; surface temperature distribution; thermal management; wire coil heater; Assembly; Cathodes; Heat transfer; Heating; Nonhomogeneous media; Wire; dispenser cathode; heater; temperature distribution;
fLanguage
English
Publisher
ieee
Conference_Titel
Vacuum Electronics Conference (IVEC), 2011 IEEE International
Conference_Location
Bangalore
Print_ISBN
978-1-4244-8662-5
Type
conf
DOI
10.1109/IVEC.2011.5747031
Filename
5747031
Link To Document