• DocumentCode
    2903427
  • Title

    Thermal management: Use of aluminum-nitride multilayer heaters in dispenser cathodes

  • Author

    Busbaher, Daniel ; Smith, Peter C. ; LeClair, Robert W.

  • Author_Institution
    Semicon Assoc., Lexington, KY, USA
  • fYear
    2011
  • fDate
    21-24 Feb. 2011
  • Firstpage
    373
  • Lastpage
    374
  • Abstract
    Dispenser cathodes must operate at specific temperature while applying specific heater power. To achieve the required temperature a wire coil heater is commonly used. During the heater and cathode design process several aspects (structure rigidness, heat transfer path, uniformity of surface temperature distribution, heater and cathode life) have to be taken under consideration which makes the design difficult and costly. This paper offers an insight into study of aluminum-nitride drop-in heater package as a heating element for dispenser cathodes.
  • Keywords
    III-V semiconductors; cathodes; coils; multilayers; temperature distribution; thermal management (packaging); wires; aluminum-nitride drop-in heater package; dispenser cathodes; heating element; multilayer heaters; surface temperature distribution; thermal management; wire coil heater; Assembly; Cathodes; Heat transfer; Heating; Nonhomogeneous media; Wire; dispenser cathode; heater; temperature distribution;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Vacuum Electronics Conference (IVEC), 2011 IEEE International
  • Conference_Location
    Bangalore
  • Print_ISBN
    978-1-4244-8662-5
  • Type

    conf

  • DOI
    10.1109/IVEC.2011.5747031
  • Filename
    5747031