DocumentCode
2903653
Title
Influence of Os-Ru coating on closed-space diode tests of M-Type dispenser cathodes
Author
Swartzentruber, P. ; Balk, T.J. ; Roberts, S.
Author_Institution
Dept. of Chem. & Mater. Eng., Univ. of Kentucky, Lexington, KY, USA
fYear
2011
fDate
21-24 Feb. 2011
Firstpage
401
Lastpage
402
Abstract
Life testing of M-Type dispenser cathodes was performed for 1000 hours to help quantify the performance enhancement due to different osmium-ruthenium (Os-Ru) thin film microstructures. Os-Ru film microstructures were selected based on their potential to inhibit tungsten/Os-Ru interdiffusion as identified in previous studies. The results show that the 10 W substrate biased 150 nm thick film yielded a very stable knee temperature throughout its life. However, the knee temperature was high in comparison to the standard Semicon film.
Keywords
cathodes; coatings; osmium; ruthenium; thin films; M-Type dispenser cathode; Os-Ru; Os-Ru coating; Os-Ru film microstructure; closed-space diode test; interdiffusion; osmium-ruthenium; thin film microstructure; Barium; Cathodes; Coatings; Films; Knee; Microstructure; Tungsten; M-coating; M-type; dispenser cathode; knee temperature; microstructure; osmium; ruthenium; thin film;
fLanguage
English
Publisher
ieee
Conference_Titel
Vacuum Electronics Conference (IVEC), 2011 IEEE International
Conference_Location
Bangalore
Print_ISBN
978-1-4244-8662-5
Type
conf
DOI
10.1109/IVEC.2011.5747045
Filename
5747045
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