Title :
High mobility strained p-channel germanium quantum well field effect transistor for low power (Vcc = 0.5 V) III–V CMOS applications
Author :
Pillarisetty, Ravi
Author_Institution :
Components Res., Technol. & Manuf. Group, Intel Corp., Hillsboro, OR, USA
Abstract :
In this talk, we review recent research results (Pillarisetty et al., 2010) investigating the germanium quantum well field effect transistor (QWFET) for use as the p-channel device option for future low power (Vcc = 0.5V) III-V CMOS architecture. We demonstrate a high mobility Ge p-channel QWFET, with scaled TOXE = 14.5Å and mobility of 770 cm2/V*s at ns =5×1012 cm-2. For TOXE <; 40 Å, this represents the highest hole mobility reported for any Ge device and is 4x higher than state-of-the-art strained silicon (Packan et al., 2008). Furthermore, at Vcc = 0.5V, the Ge QWFET exhibits 2x higher drive current at fixed Ioff than the best III-V (Radosavljevic et al., 2008) and germanium devices (Mitard et al., 2008) reported to date. These results suggest the Ge QWFET is a viable p-channel option for non-silicon CMOS.
Keywords :
III-V semiconductors; elemental semiconductors; field effect transistors; germanium; low-power electronics; quantum well devices; Ge; III-V CMOS applications; III-V CMOS architecture; QWFET; drive current; germanium devices; high mobility strained p-channel germanium quantum well field effect transistor; nonsilicon CMOS; p-channel device option; voltage 0.5 V;
Conference_Titel :
Device Research Conference (DRC), 2011 69th Annual
Conference_Location :
Santa Barbara, CA
Print_ISBN :
978-1-61284-243-1
Electronic_ISBN :
1548-3770
DOI :
10.1109/DRC.2011.5994510