Title :
Defect analysis of roll-to-roll SAIL manufactured flexible display backplanes
Author :
Taussig, Carl ; Elder, Richard E. ; Jackson, Warren B. ; Jeans, Albeit ; Jam, Mehrban ; Holland, Ed ; Luo, Hao ; Maltabes, John ; Perlov, Craig ; Trovinger, Steven ; Almanza-Workman, Marcia ; Garcia, Robelt A. ; Kim, HanJun ; Kwon, Ohseung ; Jeffrey, Fran
Author_Institution :
HP Labs., Palo Alto, CA, USA
Abstract :
HP and Phicot have made the world´s first roll-to-roll (R2R) manufactured active matrix displays. Currently we are developing a wrist-worn solar powered display for the U.S. Army. As we scale from research to preproduction on our 1/3 meter wide pilot line defect analysis and mitigation is our primary focus. In this presentation we will review the self-aligned imprint lithography (SAIL) process and discuss defects we observe, and the tools, and processes we have developed to detect and eliminate them.
Keywords :
flexible displays; lithography; active matrix displays; pilot line defect analysis; roll-to-roll SAIL manufactured flexible display backplanes; self-aligned imprint lithography; wrist-worn solar powered display; Backplanes; Fabrication; Lithography;
Conference_Titel :
Device Research Conference (DRC), 2011 69th Annual
Conference_Location :
Santa Barbara, CA
Print_ISBN :
978-1-61284-243-1
Electronic_ISBN :
1548-3770
DOI :
10.1109/DRC.2011.5994515
