Title :
Defect Diagnosis - Reasoning Methodology
Author :
Sato, Yasuo ; Sugiura, Kazushi ; Shimoda, Reisuke ; Yoshizawa, Yutaka ; Norimatsu, Kenji ; Sanada, Masaru
Author_Institution :
Semicond. Technol. Acad. Res. Center, Yokohama
Abstract :
Diagnosis has become a crucial technology for early debugging and yield improvement. However, the conventional diagnosis methods are not good at locating the defects that are not precisely expressed only with logical fault models. In this paper, we propose a novel defect diagnosis methodology, which is based on the evaluation of defect behaviors using physical information. We examine suspected nodes\´ voltages by comparing with the observed responses of ATE. In the examination, we use "defect activation", which is an estimation method of defective nodes\´ voltages using physical information. Using this methodology, we introduce examples of diagnosis for open defects in a cell, and for interconnect open defects. Those successful results show the effectiveness of the defect diagnosis
Keywords :
automatic test equipment; estimation theory; fault diagnosis; integrated circuit testing; logic testing; ATE; cell open defects; defect activation; defect diagnosis method; defective nodes´ voltages; estimation method; interconnect open defects; physical information; Cause effect analysis; Debugging; Fabrication; Failure analysis; Fault diagnosis; Logic testing; Process design; Voltage; Wires; Wiring;
Conference_Titel :
Test Symposium, 2006. ATS '06. 15th Asian
Conference_Location :
Fukuoka
Print_ISBN :
0-7695-2628-4
DOI :
10.1109/ATS.2006.261022