Title :
Micro-machining of several materials with the FHG of YAG laser beams
Author :
Watanabe, Takehiro
Author_Institution :
Fac. of Eng., Chiba Univ.
Abstract :
Micro-machining with laser beams is carried out in many fields such as micro-machine devices, chemistry, biochemistry, medical science etc.. Laser beams used in such fields are short-wave length and ultra-short pulse lasers. Laser system with short-wave length of the FHG of YAG laser is used in this research work. The wave length is 266 nm and the pulse duration is 6 ns. Beam quality is very important in micro-machining. Arbitrary shapes were machined using developed laser machining system
Keywords :
high-speed optical techniques; laser beam machining; laser beams; laser materials processing; micromachining; 266 nm; 6 ns; FHG; YAG laser beams; beam quality; laser machining system; micromachining; short-wave length laser; ultra-short pulse lasers; Biochemistry; Biological materials; Biomedical materials; Chemical lasers; Chemistry; Laser beams; Laser theory; Optical materials; Optical pulses; Shape;
Conference_Titel :
Lasers and Electro-Optics Europe, 2005. CLEO/Europe. 2005 Conference on
Conference_Location :
Munich
Print_ISBN :
0-7803-8974-3
DOI :
10.1109/CLEOE.2005.1568428
