Title :
New Trench Depth Measurement System with Wavelength-Rapidly-Scanning Acousto-Optic Tunable Filter for VLSI DRAMs Capacitor Cells
Author :
Takada, Kazumasa ; Noda, Juichi ; Nakajima, Sigeru
Author_Institution :
NTT Opto-Electronics Laboratory
Conference_Titel :
Precision Electromagnetic Measurements, 1988. CPEM 88 Digest. 1988 Conference on
Conference_Location :
Ibaraki, Japan
DOI :
10.1109/CPEM.1988.671295
