Title :
Optical interactions in ZnO-TeO2 bi-layer for AO device applications
Author :
Nayak, Ranu ; Nayak, Abhijit ; Gupta, Vinay ; Sreenivas, K.
Author_Institution :
Dept. of Phys. & Astrophys., Delhi Univ., India
Abstract :
A bi-layer structure using amorphous TeO2 and piezoelectric ZnO thin film has been grown on Corning glass (cg) substrate to investigate its compatibility for an acousto-optic (AO) device. Initially, TeO2-x films were grown at different oxygen partial pressures and, structural and optical characterization were performed to optimize the O2 gas pressure. Effect of post-deposition annealing was studied for achieving low optical loss. Optical waveguiding was observed by prism coupling technique and the loss measurements were done. Subsequently, a high quality c-axis oriented ZnO film was grown, which is known to be suitable for SAW propagation. Finally, a TeO2-ZnO bi-layer was grown with a clean interface and optical waveguiding was observed. Implications related to a large thickness of ZnO have been discussed and a better alternate feasible TeO2-ZnO structure is proposed.
Keywords :
acousto-optical devices; annealing; optical waveguides; piezoelectric thin films; sputter deposition; thin films; Corning glass substrate; SAW propagation; ZnO-TeO2; acousto-optic device; amorphous thin film; gas pressure; loss measurements; optical characterization; optical interactions; optical loss; optical waveguiding; piezoelectric thin film; post-deposition annealing; prism coupling; reactive rf sputtering; structural characterization; Amorphous materials; Annealing; Glass; Optical coupling; Optical films; Optical losses; Piezoelectric films; Substrates; Thin film devices; Zinc oxide;
Conference_Titel :
Ultrasonics, 2003 IEEE Symposium on
Print_ISBN :
0-7803-7922-5
DOI :
10.1109/ULTSYM.2003.1293099
