Phase-sensitive absolute-amplitude measurements of surface waves using heterodyne interferometry

Author

Kokkonen, K. ; Knuuttila, J.V. ; Plessky, V.P. ; Salomaa, Martti M.

Author_Institution

Mater. Phys. Lab., Helsinki Univ. of Technol., Finland

Volume

2

fYear

2003

fDate

5-8 Oct. 2003

Firstpage

1145

Abstract

Phase-sensitive absolute-amplitude measurements of surface waves using heterodyne interferometry. We describe a novel heterodyne interferometer for scanning surface-acoustic waves at high frequencies, up to 6 GHz. The heterodyne operation facilitates the measurement of the absolute amplitude of the surface waves without calibration. It simultaneously also enables measuring the phase. The amplitude and phase information allows a precise characterization of the surface acoustic waves. Moreover, the wave motion can be visualized in the form of animations to gain insight. The interferometer has been tested by measuring a 167 MHz SPUDT device and a 374 MHz fan-shaped SAW filter.

Keywords

acoustic variables measurement; acoustic wave interferometers; acoustic wave interferometry; phase measurement; surface acoustic waves; 167 MHz; 364 MHz; SAW filter; SPUDT device; absolute-amplitude measurements; heterodyne interferometer; heterodyne interferometry; phase information; phase-sensitive measurements; surface acoustic waves; surface waves; wave motion; Acoustic measurements; Acoustic waves; Calibration; Frequency; Interferometry; Phase measurement; Surface acoustic wave devices; Surface acoustic waves; Surface waves; Visualization;

fLanguage

English

Publisher

ieee

Conference_Titel

Ultrasonics, 2003 IEEE Symposium on

Print_ISBN

0-7803-7922-5

Type

conf

DOI

10.1109/ULTSYM.2003.1293103

Filename

1293103