Title :
Design of coupled resonator filters using admittance and scattering matrices
Author :
Reinhardt, Alexandre ; Laude, Vincent ; Lanz, Roman ; Muralt, Paul ; Solal, Marc ; Ballandras, Sylvain ; Steichen, William
Author_Institution :
Lab. de Phys. et Metrologie des Oscillateurs, Univ. de Franche-Comte, Besancon, France
Abstract :
The longitudinal coupling of thin film bulk acoustic resonator (FBAR) is investigated in order to design coupled resonator filter (CRF). Such devices are dedicated to high-frequency filter applications. A scattering matrix algorithm that was already used to simulate simple FBARs devices is used to study the behavior of these structures. The principle of the algorithm is recalled and is explained how it can be adapted to the simulation of multiport devices. Then an example of filter design is given.
Keywords :
S-matrix theory; acoustic resonator filters; electric admittance; resonator filters; scattering; admittance matrices; coupled resonator filters; filter design; high-frequency filter; longitudinal coupling; multiport devices; scattering matrices; scattering matrix algorithm; thin film bulk acoustic resonator; Acoustic scattering; Admittance; Ceramics; Dielectric thin films; Electrostatics; Film bulk acoustic resonators; Frequency; Nonhomogeneous media; Piezoelectric films; Resonator filters;
Conference_Titel :
Ultrasonics, 2003 IEEE Symposium on
Print_ISBN :
0-7803-7922-5
DOI :
10.1109/ULTSYM.2003.1293172
