Information technique implementing system concepts for microsystems

Author

Ullmann, Rudolf ; Trankler, Hans-Rolf

Author_Institution

Inst. fur Mess- und Automatisierungstech., Univ. der Bundeswehr Munchen, Neubiberg, Germany

fYear

1993

fDate

17-20 Oct 1993

Firstpage

435

Abstract

Along with the increasing availability of new miniaturized functional elements and the success in their integration, system concepts for microsystems development are becoming an important issue. The possibilities and the wide field of applications of digital information techniques in (embedded control/signal processing), between (communications) and for (CIM-tools for development/manufacturing) microsystems are revealed. Emphasis is put on system concepts meeting typical technological shortcomings of miniaturized systems. Concepts for sensor-specific signal processing for an acceleration measurement system and a system architecture for higher reliability and cross sensitivity correction for gas multisensor microsystems are introduced as examples. Consequences concerning design strategies for complex microsystems are deduced

Keywords

acceleration measurement; accelerometers; gas sensors; mechatronics; micromechanical devices; signal processing; accelerometer; cross sensitivity correction; digital information techniques; gas multisensor; microsystems; miniaturized functional elements; miniaturized systems; sensor-specific signal processing; system concepts; Accelerometers; CMOS technology; Chemical sensors; Control systems; Intelligent actuators; Intelligent sensors; Mechanical factors; Sensor systems; Signal processing; Space technology;

fLanguage

English

Publisher

ieee

Conference_Titel

Systems, Man and Cybernetics, 1993. 'Systems Engineering in the Service of Humans', Conference Proceedings., International Conference on

Conference_Location

Le Touquet

Print_ISBN

0-7803-0911-1

Type

conf

DOI

10.1109/ICSMC.1993.390752

Filename

390752