DocumentCode
2907406
Title
A novel type of piezoelectric minimotor for linear displacements
Author
De Almeida, Vitorio Arrivabeni Longo ; Eiras, Jose Antonio ; Ibrahim, R.C.
Author_Institution
Dept. of Mechatronic Eng., Sao Paulo Univ., Brazil
Volume
2
fYear
2003
fDate
5-8 Oct. 2003
Firstpage
1774
Abstract
This work shows the results of our studies on a new type of piezoelectric minimotor for precision linear displacements. The stator structure consists of two piezoelectric ceramics adhered to a thin copper plate patterned in such a way that elliptic motion can be generated when driven by two sinusoidal voltages with a phase difference. A simple stage, pressed against the top surface of the tip of the stator, can move following a straight line. The actuation is based on the planar vibration mode of small ceramic plates. The copper plate is patterned using photolithography and etching. In this way, complex geometries can be obtained.
Keywords
piezoceramics; ultrasonic motors; actuation; ceramic plates; elliptic motion; etching; linear displacements; phase difference; photolithography; piezoelectric ceramics; piezoelectric minimotor; planar vibration mode; sinusoidal voltages; stator structure; thin copper plate; Ceramics; Copper; Etching; Impedance; Leg; Lithography; Resonant frequency; Stators; Testing; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Ultrasonics, 2003 IEEE Symposium on
Print_ISBN
0-7803-7922-5
Type
conf
DOI
10.1109/ULTSYM.2003.1293256
Filename
1293256
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