Improved homogeneity of LP-MOVPE grown InP/GaInAsP heterostructure for DBR using an optimized liner and susceptor arrangement

Author

Westphalen, R. ; Landgren, G. ; Stålnacke, B. ; Beccard, R.

Author_Institution

Dept. of Electron., R. Inst. of Technol., Stockholm, Sweden

fYear

1999

fDate

1999

Firstpage

139

Lastpage

142

Abstract

Growth of distributed Bragg reflectors and strain compensated MQW for 1550 nm VCSEL have been investigated in a AIX 200/4 LP-MOVPE system with a 3×2" wafer configuration using an improved liner and susceptor configuration. The shift in the stopband wavelength for DBR could be reduced by one order of magnitude down to +0.6% (+9 nm) within 40 mm diameter compared to the standard setup. For 1420 nm quaternary layers used in such DBR the area with a wavelength shift of less the 1 nm can nearly be doubled. In case of strain compensated MQW a similar improvement in wavelength homogeneity was observed, mainly due to reduced thickness variation from ±2.5% to ±0.8%

Keywords

III-V semiconductors; MOCVD coatings; distributed Bragg reflector lasers; gallium arsenide; gallium compounds; indium compounds; semiconductor epitaxial layers; semiconductor growth; semiconductor heterojunctions; vapour phase epitaxial growth; 1550 nm; 1550 nm VCSEL; 2 in; 3 in; 40 mm; DBR; InP-GaInAsP; LP-MOVPE grown InP/GaInAsP heterostructure; distributed Bragg reflectors; improved homogeneity; optimized liner and susceptor arrangement; reduced thickness variation; standard setup; stopband wavelength; strain compensated MQW; wavelength shift; Capacitive sensors; Distributed Bragg reflectors; Epitaxial growth; Epitaxial layers; Indium phosphide; Quantum well devices; Satellites; Tensile strain; Vertical cavity surface emitting lasers; Wavelength measurement;

fLanguage

English

Publisher

ieee

Conference_Titel

Indium Phosphide and Related Materials, 1999. IPRM. 1999 Eleventh International Conference on

Conference_Location

Davos

ISSN

1092-8669

Print_ISBN

0-7803-5562-8

Type

conf

DOI

10.1109/ICIPRM.1999.773654

Filename

773654