Recent advances and new trends in nanotechnology and 3D integration for semiconductor industry

“There´s Plenty of Room at the Bottom” is the title of Richard Feynman´s lecture on December 29^th, 1959 to the American Physical Society at California Institute of Technology (Caltech) and is generally considered to be the very first speech about nanotechnology. Some important milestones of nanotechnology will be briefly mentioned and the emphasis is placed on the applications and outlooks of nanotechnology in electronics. “Computing Machines in the Future” is the title of the Nishina Memorial Lecture at Gakushuin University in Tokyo given by the 1965 Nobel Physics Laureate, Richard Feynman on August 9^th, 1985. During the lecture, Feynman not only told us to go for 3D integration, but also taught us how to do it! In this study, 3D integration will be the focus and the emphasis is placed on 3D IC integration and their recent advances and new trends. 3D Si integration will be briefly discussed.