Title :
Synthesized compact model and experimental results for substrate noise coupling in lightly doped processes
Author :
Lan, Hai ; Chen, Tze Wee ; On Chui, Chi ; Nikaeen, Parastoo ; Kim, Jae Wook ; Dutton, Robert W.
Author_Institution :
Dept. of Electr. Eng., Stanford Univ., CA, USA
Abstract :
A synthesized compact model of substrate coupling resistance for lightly doped substrate processes is proposed. The model incorporates all geometrical parameters including geometrical mean distance with a few process-dependent fitting coefficients. The model accuracy is shown to be within 15% error using the measurement data from two test chips, one in a customized lightly doped process and the other one in a 0.18-μm BiCMOS lightly doped process. Substrate noise distribution on a 2 mm by 2 mm chip with 319 substrate contacts is shown with the calibrated SCM model.
Keywords :
BiCMOS integrated circuits; integrated circuit modelling; integrated circuit noise; integrated circuit testing; semiconductor doping; substrates; 0.18 micron; BiCMOS process; geometrical mean distance; lightly doped processes; process-dependent fitting coefficients; substrate contacts; substrate coupling resistance; substrate noise coupling; substrate noise distribution; synthesized compact model; Circuit noise; Coupling circuits; Geometry; Impact ionization; Optical coupling; Power supplies; Semiconductor device measurement; Solid modeling; Substrate hot electron injection; Testing;
Conference_Titel :
Custom Integrated Circuits Conference, 2005. Proceedings of the IEEE 2005
Print_ISBN :
0-7803-9023-7
DOI :
10.1109/CICC.2005.1568708
