Title :
Advanced SCR ESD protection circuits for CMOS/SOI nanotechnologies
Author :
Mergens, Markus P J ; Marichal, Olivier ; Thijs, Steven ; Van Camp, Benjamin ; Russ, Christian C.
Author_Institution :
Infineon Technol. AG, Munich
Abstract :
This paper reviews the application of SCR-based ESD protection circuits in advanced CMOS/SOI technologies. The devices are integrated in a flexible modular circuit design technique allowing for independent optimization of key characteristics. The IC application focus is on sensitive IOs, i.e. (ultra-)thin GOX input protection and robust output driver design using SCRs. Moreover, SCR transfer and integration into advanced SOI technologies is discussed. RF ESD principles are considered as well
Keywords :
CMOS integrated circuits; electrostatic discharge; nanoelectronics; silicon-on-insulator; solid-state rectifiers; CMOS nanotechnology; RF ESD principles; SCR ESD protection circuits; SCR transfer; SOI nanotechnology; electrostatic discharge protection; modular circuit design technique; output driver design; ultrathin gate oxide input protection; Application specific integrated circuits; CMOS technology; Circuit synthesis; Design optimization; Driver circuits; Electrostatic discharge; Integrated circuit technology; Protection; Robustness; Thyristors;
Conference_Titel :
Custom Integrated Circuits Conference, 2005. Proceedings of the IEEE 2005
Conference_Location :
San Jose, CA
Print_ISBN :
0-7803-9023-7
DOI :
10.1109/CICC.2005.1568712
