Numerical analysis of thin film BAW resonators

Thin film bulk acoustic wave (TBAW) resonators are of increasing interest for a wide variety of system applications. These resonators are used as stand alone frequency control devices in oscillators or are incorporated into electrically or acoustically coupled filters. The purity of the resonance has a strong effect on the performance of filters or other applications using TBAW resonator. This paper will present results from an analysis of resonators having a range of width to thickness ratios and explore the issues associated with plate waves and their management in resonator design. The analysis technique will be reviewed but the major goal is to facilitate a physical insight into resonator design for TBAW applications.