RF testing of MEMS components

Author

Deakin, D. ; DeNatale, Jeffrey ; Higgins, J. ; Mihailovich, R. ; Park, S. ; Pascal, M. ; Richardson, P. ; Pollock, G. ; Sailer, A. ; Sovero, E. ; Studer, J. ; Sullivan, G. ; Tran, L. ; Waldrop, J. ; Wang, A. ; Yao, J. ; Anderson, G. ; Erlandson, R.

Author_Institution

Rockwell Sci. Center, Thousand Oaks, CA, USA

fYear

1998

fDate

24-27 Aug 1998

Firstpage

163

Abstract

The authors discuss some of the testing issues associated with the RF characterization of MEMS components. More specifically, they present testing methods and experimental results for two RF MEMS components-an RF switch and a tunable capacitor. RF measurements including insertion loss, electrical isolation, linearity, and vibration sensitivity are among the MEMS characteristics to be presented, as are the electromechanical measurements including response time, actuation characteristics, and contact wear

Keywords

capacitors; characteristics measurement; electric variables measurement; electronic equipment testing; micromechanical devices; radio equipment; switches; telecommunication equipment testing; MEMS characteristics; MEMS components; RF MEMS components; RF switch; RF testing; actuation characteristics; contact wear; electrical isolation; electromechanical measurements; insertion loss; linearity; response time; tunable capacitor; vibration sensitivity; Capacitors; Electric variables measurement; Loss measurement; Micromechanical devices; Radio frequency; Radiofrequency microelectromechanical systems; Switches; Testing; Time measurement; Vibration measurement;

fLanguage

English

Publisher

ieee

Conference_Titel

AUTOTESTCON '98. IEEE Systems Readiness Technology Conference., 1998 IEEE

Conference_Location

Salt Lake City, UT

ISSN

1088-7725

Print_ISBN

0-7803-4420-0

Type

conf

DOI

10.1109/AUTEST.1998.713438

Filename

713438