Design and modeling of a quasi-static peristaltic piezoelectric micropump

Microfluidics has high potential applications in medical devices for drug delivery, dosing, in micro lab on a chip, microelectronic cooling systems and others. Driving fluid from one point to an other in those systems is a major challenge. To achieve this goal various micropumps have been proposed. In this paper a valveless pump actuated by piezoelectric benders put in series is studied. The benders are activated one after the other to create a peristaltic movement of the driving membrane. The design is presented and in order to optimize the structure an analytical model is proposed. The model is used to evaluate quickly the pumped volume as well as the stresses in the benders. FEM is then used to confirm approximations which have been made.