• DocumentCode
    2909433
  • Title

    Measurement of Nanometer Topography by Scanning Tunneling Microscope

  • Author

    Kobayashi, Y. ; Okayama, S. ; Komuro, M. ; Okano, M. ; Watanabe, S. ; Homma, A.

  • Author_Institution
    Kosaka Laboratory Ltd.
  • fYear
    1988
  • fDate
    7-10 June 1988
  • Firstpage
    329
  • Lastpage
    329
  • Abstract
    Scanning tunneling microscopes (STM) of two different types were developed for measurement of nanometer order three-dimensional topography. Topographic maps of fine grid patterns on Si substrate fabricated by focused ion-beam lithography, optical grating and a compact disk stamper were obtained with resolution of around 10 nm by using electrochemically formed tips.
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Precision Electromagnetic Measurements, 1988. CPEM 88 Digest. 1988 Conference on
  • Conference_Location
    Ibaraki, Japan
  • Type

    conf

  • DOI
    10.1109/CPEM.1988.671326
  • Filename
    671326
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2909433