Comprehensive analysis of SAW sensor performance in liquid media by Green´s function method

Author

Powell, David A. ; Kalantar-zadeh, Kourosh ; Wlodarski, Wojtek

Author_Institution

Sch. of Electr. & Comput. Eng., RMIT Univ., Melbourne, Vic., Australia

Volume

1

fYear

2003

fDate

5-8 Oct. 2003

Firstpage

146

Abstract

A rigorously derived Green´s function is applied to a surface acoustic wave (SAW) sensor, operating with a layer above the inter-digital transducer (IDT) and including the effects of a liquid loading. The extracted reflection, transduction and capacitance values are suitable for utilisation in the design of surface and plate mode sensors. This technique was applied to devices on 36°-YX LiTaO₃, with guiding layers of SiO₂ and ZnO.

Keywords

Green´s function methods; II-VI semiconductors; acoustic wave reflection; capacitance; interdigital transducers; lithium compounds; silicon compounds; surface acoustic wave sensors; zinc compounds; Green function method; LiTaO₃-ZnO-SiO₂; SAW sensors; capacitance; extracted reflection; interdigital transducer; liquid loading effects; liquid media; plate mode sensor design; surface mode sensor design; transduction; Acoustic reflection; Acoustic sensors; Acoustic transducers; Acoustic waves; Capacitance; Capacitive sensors; Green´s function methods; Performance analysis; Surface acoustic wave devices; Surface acoustic waves;

fLanguage

English

Publisher

ieee

Conference_Titel

Ultrasonics, 2003 IEEE Symposium on

Print_ISBN

0-7803-7922-5

Type

conf

DOI

10.1109/ULTSYM.2003.1293375

Filename

1293375