Title :
Comprehensive analysis of SAW sensor performance in liquid media by Green´s function method
Author :
Powell, David A. ; Kalantar-zadeh, Kourosh ; Wlodarski, Wojtek
Author_Institution :
Sch. of Electr. & Comput. Eng., RMIT Univ., Melbourne, Vic., Australia
Abstract :
A rigorously derived Green´s function is applied to a surface acoustic wave (SAW) sensor, operating with a layer above the inter-digital transducer (IDT) and including the effects of a liquid loading. The extracted reflection, transduction and capacitance values are suitable for utilisation in the design of surface and plate mode sensors. This technique was applied to devices on 36°-YX LiTaO3, with guiding layers of SiO2 and ZnO.
Keywords :
Green´s function methods; II-VI semiconductors; acoustic wave reflection; capacitance; interdigital transducers; lithium compounds; silicon compounds; surface acoustic wave sensors; zinc compounds; Green function method; LiTaO3-ZnO-SiO2; SAW sensors; capacitance; extracted reflection; interdigital transducer; liquid loading effects; liquid media; plate mode sensor design; surface mode sensor design; transduction; Acoustic reflection; Acoustic sensors; Acoustic transducers; Acoustic waves; Capacitance; Capacitive sensors; Green´s function methods; Performance analysis; Surface acoustic wave devices; Surface acoustic waves;
Conference_Titel :
Ultrasonics, 2003 IEEE Symposium on
Print_ISBN :
0-7803-7922-5
DOI :
10.1109/ULTSYM.2003.1293375
