• DocumentCode
    2909611
  • Title

    Emerging CMOS-Devices and Applications

  • Author

    Fabel, B. ; Maul, T. ; Nowack, L. ; Sterkel, M. ; Hansch, W.

  • Author_Institution
    Tech. Univ. Munich, Munchen
  • fYear
    2007
  • fDate
    26-28 Sept. 2007
  • Firstpage
    361
  • Lastpage
    364
  • Abstract
    The continuous shrinking of CMOS devices forces the development of new technologies, emerging devices and applications. Examples of research in these fields are presented.
  • Keywords
    CMOS integrated circuits; CMOS-devices; circuit applications; nanotechnologies; Atomic layer deposition; Bonding; CMOS technology; Circuits; High K dielectric materials; Hydrogen; Nitrogen; Silicon; Temperature; Thermal resistance;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Integrated Circuits, 2007. ISIC '07. International Symposium on
  • Conference_Location
    Singapore
  • Print_ISBN
    978-1-4244-0797-2
  • Electronic_ISBN
    978-1-4244-0797-2
  • Type

    conf

  • DOI
    10.1109/ISICIR.2007.4441873
  • Filename
    4441873
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2909611