• DocumentCode
    2909727
  • Title

    SAW resonators at high temperatures

  • Author

    Buff, W. ; Binhack, M. ; Klett, S. ; Hamsch, M. ; Hoffmann, R. ; Krispel, F. ; Wallnöfer, W.

  • Author_Institution
    Tech. Univ., Ilmenau, Germany
  • Volume
    1
  • fYear
    2003
  • fDate
    5-8 Oct. 2003
  • Firstpage
    187
  • Abstract
    This paper discusses SAW resonators. The SAW device consists of a piezoelectric substrate with a metalization. It is shown that the sytems langasite-Pt and gallium orthophosphate-Pt are able to fulfill the demands for a high temperature operation. An AFM scan of metalization is also available.
  • Keywords
    atomic force microscopy; electric admittance; gallium compounds; high-temperature effects; lanthanum compounds; metallisation; piezoelectric materials; platinum; surface acoustic wave resonators; thermal stability; AFM; La3Ga5SiO14-Pt; Pt-GaPO4; SAW device; SAW resonators; gallium orthophosphate; langasite; metalization; piezoelectric substrate; platinum; Circuits; Crystalline materials; Pollution measurement; Pyroelectricity; Surface acoustic wave devices; Surface acoustic waves; Temperature distribution; Temperature measurement; Temperature sensors; Wireless sensor networks;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Ultrasonics, 2003 IEEE Symposium on
  • Print_ISBN
    0-7803-7922-5
  • Type

    conf

  • DOI
    10.1109/ULTSYM.2003.1293385
  • Filename
    1293385
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2909727