Title :
A 3-dimensional finite element approach for simulating acoustic wave propagation in layered SAW devices
Author :
Ippolito, Samuel J. ; Kalantar-zadeh, Kourosh ; Powell, David A. ; Wlodarski, Wojtek
Author_Institution :
Sch. of Electr. & Comput. Eng., RMIT Univ., Melbourne, Vic., Australia
Abstract :
A finite-element model is investigated for the 3-dimensional transient analysis of a two-port delay line layered SAW device. The structure is a XY LiNbO3 substrate with a ZnO guiding layer. The effect of electromagnetic feed-through and wave propagation of each displacement component in distinct directions are investigated. The frequency response obtained by the finite-element model shows good agreement with experimental data whilst also providing a useful insight to surface acoustic wave propagation in layered media.
Keywords :
acoustic wave propagation; finite element analysis; surface acoustic wave delay lines; transient analysis; LiNbO3-ZnO; acoustic wave propagation; electromagnetic feed-through effect; finite element analysis; surface acoustic wave delay lines; three dimensional transient analysis; tow port delay line layered SAW devices; tow port delay line layered surface acoustic wave devices; Acoustic propagation; Acoustic waves; Delay lines; Electromagnetic propagation; Electromagnetic scattering; Finite element methods; Frequency response; Surface acoustic wave devices; Transient analysis; Zinc oxide;
Conference_Titel :
Ultrasonics, 2003 IEEE Symposium on
Print_ISBN :
0-7803-7922-5
DOI :
10.1109/ULTSYM.2003.1293411
