DocumentCode
2911474
Title
Low cost microscope add-on system for subpixel resolution displacement measurement
Author
Augutis, V. ; Gailius, D. ; Kuzas, P.
Author_Institution
Kaunas Univ. of Technol., Kaunas
fYear
2007
fDate
1-3 May 2007
Firstpage
1
Lastpage
4
Abstract
Many complex and expensive mechanical systems exist, and their possibilities in many cases can be enhanced using modern electronics. An optic submicrometer range displacement measurement system can be used as an example. Submicrometer displacement measurements are mainly based on interferometric and correlation methods. Implementing interferometric methods in most cases is sophisticated, because of complexity an high price of supporting signal conditioning systems. Correlation methods are limited in resolution because of finite number of picture elements used in cross correlation realization. Our aim is to offer an effective, relatively cheap solution for submicrometer displacement measurements and to investigate metrological characteristics of developed system.
Keywords
computerised instrumentation; image resolution; micrometry; optical images; interferometric-correlation methods; metrological characteristics; microscope add-on system; optic submicrometer range displacement measurement system; signal conditioning systems; submicrometer displacement measurements; subpixel resolution displacement measurement; Calibration; Correlation; Costs; Displacement measurement; Interferometric lithography; Microscopy; Optical interferometry; Optical sensors; Signal processing; Signal resolution; Subpixel; displacement; measurement;
fLanguage
English
Publisher
ieee
Conference_Titel
Instrumentation and Measurement Technology Conference Proceedings, 2007. IMTC 2007. IEEE
Conference_Location
Warsaw
ISSN
1091-5281
Print_ISBN
1-4244-0588-2
Type
conf
DOI
10.1109/IMTC.2007.379188
Filename
4258249
Link To Document