Modeling piezoelectrically driven micro/nanopositioning systems with high operating frequency

This paper presents an approach to modeling the dynamic hysteresis nonlinearity in the major loop of a piezoelectric stack actuator. The dynamic hysteresis model structure is analyzed and an artificial neural network is designed to identify the static hysteresis model in the major loop of the piezoelectric actuator. Experiment shows that the accuracy of the dynamic hysteresis model is better than the static hysteresis model when the piezoelectric actuator operates at high frequency in full range. The dynamic nonlinear model can be used to design high bandwidth micro/nanopositioning systems.