• DocumentCode
    2911930
  • Title

    Toxic gas sensor using resonant frequency variation in micro-cantilever

  • Author

    Subhashini, S. ; Vimala Juliet, A.

  • Author_Institution
    Sathyabama Univ., Chennai, India
  • fYear
    2012
  • fDate
    6-9 Oct. 2012
  • Firstpage
    87
  • Lastpage
    91
  • Abstract
    Our world is facing some drastic changes in the climatic conditions due to the heating effect caused by various greenhouse gases and is increasing at an uncontrolled rate. The people working underground are generally caught unawares of the hazardous gas emission around the locality. Hence an effective sensing and communicating system is required to effectively monitor and alert the neighborhood to save them. This paper aims in finding out a way to quantitatively measure the hazardous gas molecules. The gravimetric sensor works by absorbing the chemical in a polymer, which alters the overall mass of the sensing element i.e a cantilever, thereby its resonant frequency. Here a micro-cantilever beam is fabricated using selective coatings on the surface to selectively absorb the hazardous gases. As the gases are absorbed the mass increases and hence resonant frequency changes. This change in frequency gives the measure of the quantity of gas present in that environment. The major expected advantage of this technique would be the portability, sensitivity, repeatability and economic cost of the sensor that is used.
  • Keywords
    cantilevers; gas sensors; microfabrication; microsensors; polymers; climatic conditions; gravimetric sensor; greenhouse gases; hazardous gas emission; microcantilever; polymer; resonant frequency variation; selective coatings; sensing element; toxic gas sensor; Frequency measurement; Gases; Resonant frequency; Robot sensing systems; Sensitivity; Structural beams; Cantilever; MEMS; Resonant Frequency; Signal Conditioning Circuit;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Sustainable Utilization and Development in Engineering and Technology (STUDENT), 2012 IEEE Conference on
  • Conference_Location
    Kuala Lumpur
  • ISSN
    1985-5753
  • Print_ISBN
    978-1-4673-1649-1
  • Electronic_ISBN
    1985-5753
  • Type

    conf

  • DOI
    10.1109/STUDENT.2012.6408371
  • Filename
    6408371