Micro tri-axial force sensor for 3D bio-micromanipulation

It is important to manipulate a biological small object, such as a cell and embryo. Three-dimensional high speed micromanipulation is needed as a fundamental technology for biology and bio-engineering application. In this paper, we focus on the contact type micromanipulation in the liquid. We designed and made a contact type micromanipulation system which has a 3-DOF narrow range positioning system on a 3-DOF wide range positioning system. We developed a micro tri-axial force sensor which can be installed near the tip of the end effector. Performance of this micro-force sensor is presented